MEASUREMENT DEVICE AND MEASUREMENT METHOD

专利名称：MEASUREMENT DEVICE AND

MEASUREMENT METHOD

发明人：TAMURA Akitake申请号：EP15799841.0申请日：20150501公开号：EP3150994A1公开日：20170405

专利附图：

摘要：A measurement device includes: a capturing part for causing a liquid to capturedetection target particles contained in a gas and causing a fluorescent substancespecifically bondable to the detection target particles to be bonded to the detection

target particles; a droplet forming part for forming aerosol-like droplets from the liquid;and a measurement part for irradiating light onto the droplets and measuring thefluorescence intensity of the droplets. The capturing part includes a cyclone which swirlsthe gas introduced from a gas introduction part in a circumferential direction, separatesthe detection target particles toward a wall surface of the cyclone body under a

centrifugal force, introduces the liquid from the liquid introduction part, causes the liquidto capture the detection target particles separated toward the wall surface andcontinuously supplies the liquid to the droplet forming part.

申请人：Tokyo Electron Limited

地址：Akasaka Biz Tower 3-1 Akasaka 5-chome Minato-ku Tokyo 107-6325 JP

国籍：JP

代理机构：Diehl & Partner GbR

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