专利名称：Low-gas temperature stabilization system发明人：Richard S. Muka申请号：US08/520811申请日：19950830公开号：US05520538A公开日：19960528
摘要：The temperature of articles in an \"environmental\" chamber is stabilized byevacuation of the \"environmental\" chamber, after having stabilized the temperature ofsuch an article to approximate that of a controlled-temperature member spaced fromthe article by a small gap, to a pressure just sufficient to provide viscous gas behavior,adjusting the temperature of the article to closely match that of the member by gasconduction heat transfer across the gap, and evacuating the chamber to high vacuum.
申请人：BROOKS AUTOMATION, INC.
代理机构：Nields & Lemack
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