专利名称:Semiconductor device with polycrystalline
silicon film
发明人:Masamichi Suzuki,Yusuke Higashi,Riichiro
Takaishi,Mitsuhiro Tomita,KiwamuSakuma,Yuichiro Mitani
申请号:US14792879申请日:20150707公开号:US09530855B2公开日:20161227
专利附图:
摘要:This semiconductor device comprises: a gate insulating film provided on a
surface of a channel layer; a gate electrode provided on an upper surface of the gateinsulating film; and a diffusion layer provided in the channel layer. Furthermore, thissemiconductor device comprises: a polycrystalline silicon film provided so as to cover asurface of the gate electrode and the diffusion layer; and an inter-layer insulating filmprovided so as to cover the gate electrode and the polycrystalline silicon film.
申请人:KABUSHIKI KAISHA TOSHIBA
地址:Minato-ku, Tokyo JP
国籍:JP
代理机构:Finnegan, Henderson, Farabow, Garrett & Dunner LLP
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