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Semiconductor device with polycrystalline silicon

来源:伴沃教育
专利内容由知识产权出版社提供

专利名称:Semiconductor device with polycrystalline

silicon film

发明人:Masamichi Suzuki,Yusuke Higashi,Riichiro

Takaishi,Mitsuhiro Tomita,KiwamuSakuma,Yuichiro Mitani

申请号:US14792879申请日:20150707公开号:US09530855B2公开日:20161227

专利附图:

摘要:This semiconductor device comprises: a gate insulating film provided on a

surface of a channel layer; a gate electrode provided on an upper surface of the gateinsulating film; and a diffusion layer provided in the channel layer. Furthermore, thissemiconductor device comprises: a polycrystalline silicon film provided so as to cover asurface of the gate electrode and the diffusion layer; and an inter-layer insulating filmprovided so as to cover the gate electrode and the polycrystalline silicon film.

申请人:KABUSHIKI KAISHA TOSHIBA

地址:Minato-ku, Tokyo JP

国籍:JP

代理机构:Finnegan, Henderson, Farabow, Garrett & Dunner LLP

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