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Positive working photoresist composition

来源:伴沃教育
专利内容由知识产权出版社提供

专利名称:Positive working photoresist composition发明人:Kawabe, Yasumasa, c/o Fuji Photo Film Co.,

Ltd.,Tan, Shiro, c/o Fuji Photo Film Co., Ltd.

申请号:EP96115173.5申请日:19960920公开号:EP0766139A1公开日:19970402

摘要:Provided is a positive working photoresist composition comprising (A) an alkali-soluble novolak resin obtained by condensation reaction of a mixture of phenols, whichare constituted of specified proportions of m-cresol and two kinds of specific phenols,with an aldehyde and having a Mw/Mn ratio of from 1.5 to 4.0 (wherein Mw stands for aweight-average molecular weight, and Mn stands for a number-average molecularweight); (B) a 1,2-naphthoquinonediazide-5-(and/or -4-)sulfonic acid ester as a

photosensitive material; and (C) a low molecular weight compound having from 12 to 50carbon atoms per molecule and from 2 to 8 phenolic hydroxy groups per molecule.

申请人:FUJI PHOTO FILM CO., LTD.

地址:210 Nakanuma Minami-Ashigara-shi Kanagawa JP

国籍:JP

代理机构:Barz, Peter, Dr.

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